日本YAMATO大气等离子清洗机YAP510S ：
| Atmospheric Plasma Cleaner |
| YAP510S(On Patent Applying) |
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| Outline |
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| Atmospheric Plasma Cleaner canbeapplied to wide range of usage such as electronic materialbyutilizing high-activation of high-energy electron and radicalionin plasma reaction. This equipment has a lotofadvantages; - Vacuum Process isnotrequired
- Simple Utility Preparation(Reactiongas and power supply only)
- Setting space also is saved(becauseof no vacuum system)
- Vacuum tank is not required sothatthe wider space is available for various purposes.
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| Features |
- The sample can bedirectlyplasma-processed just by putting it on the stage.
- Low Temp. Plasma isavailablebecause of the atmospheric glow-discharging plasma
- Easily applied to In-linesystembecause of no vacuum system.
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| Application |
- Surface treatment for highpolymermaterials
- Glass panel cleaning for FPD
- Ashing treatment
- Surface activation(OxidationorDeoxidization)
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| Specification |
| Standard Sample Size | 300 x300mm (Can be customized) | | Power Supply | HighFrequency Power Supply (Low Frequency also available) | | Power Output | 500W | | Gas | 3 lines(Selectable from Ar, He, O2 and N2) | | Gas Flow Rate | 1 to10L/min. | | Utility | PowerSupply AC200V, 3-phase, 15A | | Exhaust Duct | 10f | | Standard Equipment Dimensions | 730W x750D x 1,700Hmm | | Control | PLC, TouchPanel | |
