日本YAMATO等离子清洗机PC1000-5030
| PC1000-5030 |  |
| |
| Specifications |
| Model | PC1000-5030 | | Plasmamethod | RIE • DP | | Electrode | Parallelflatstageplate | | RFgenerator | 100~1000W | | Oscillationfrequency | 13.56MHz | | Controlsystem | LCDTouchpanelwith PLC | | Chambersize | (W)600×(D)370×(H)145mm | | Stage size | (W)500×(D)300mm | | Chambermaterial | Aluminum | | Reactiongas | O2,Ar,CF4,C5F8,SF6 or others | | Purge gas | N2orDryair | | Flow meter | Mass flowcontrol2line | | Vacuumpump | 700L/min | | Gas system | 2line(Reactiongas) , 1 line (Purge gas) | | Externaldimension | (W)900×(D)950×(H)1,530mm | | Powersupply | AC200/220/380V3phase 25A | |
