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仪器仪表测量计量仪器测振仪

MSA-100-3D显微式测振仪

供应商：
宝力达光学科技（东莞）有限公司
企业类型：
其他

产品简介

MSA-100-3D显微式测振仪 MSA-100-3D 显微式激光测振仪可在大带宽范围内实时测量样本的动态特性，高分辨率同时记录和分析XYZ三个方向的振动分量，每向的振幅分辨率均达到亚皮米级。因激光光斑极小，所以横向分辨率，且带宽高达 25 MHz，是用于微机电传感器(MEMS) 以及其他微结构振动测量的理想设备。通过软件移动样品，完成样品整个表面的振动分析，然后以图形方式显示振型。

详细信息


3D Vibration Measurements for Microsystems 

Micro System Analyzer is designed for 3D vibration analysis  with high lateral resolution. It is especially suited for microsystems,  precision mechanics parts and for studies on the dynamics of HGAs and  secondary actuators in the data storage industry. 

The instrument is based on a novel 3D vibrometer setup enabling  pm-resolution for both out-of-plane and in-plane motion. It has a frequency  bandwidth of 25 MHz. An integrated XY-traverse stage with full software  support for high-precision sample movement enables scanned measurements for  obtaining 3D deflection shapes. 

The optional integrated XY positioning table together with the  sophisticated software enables an easy handling of the probe.

•Real-time measurement with high bandwidth up to 25 MHz
•Sub-pm displacement resolution for both Out-of-Plane and In-Plane  motion
•Single-Point and Full-Field scanning measurements
•Small spot size of<4 μm for high lateral resolution
•Large stand-off distance of 38 mm
•Probe station compatible

 

Principal Configurations

MSA-100-3D Single-Point 3D  Vibrometer

MSA-100-3DSV Scanning 3D  Vibrometer

Sensor head unit

Microscope optics for best   lateral resolution with spot size<4 μm
  Integrated LED sample illumination

Front-End unit /
  Data management system

Installed in a system   cabinet for 19” electrical equipment:
  MSA-F-100-3D Vibrometer front end with digital decoder technology
  MSA-W-100-3D Data Management System

Stａnd (optional)

Rigid stａnd for interfacing   the sensor head unit to an optical table or breadboard,
  incl. focus block with 100 mm travel range for traversing the sensor head   unit in the Z axis

Prober compatibility

Compatible to manual,   automatic and vacuum probestations

xy Stage

Manual stage (optional)

A-PST-200P XY Precision   Positioning Stage:
  Travel range: 200 mm x 200 mm
  Tip/tilt adjustment
  Bi-directional repeatability: +/- 0.5 µm
  Load capacity: 10 kg

Software

VibSoft-1004 Software   Package for data acquisition and analysis

PSV Scanning Vibrometer   Software for data acquisition and analysis

Sensor Head Unit

Configuration

Single measurement beam,   three direction sensitive detectors

Laser source

DPSS, 532 nm, visible green   laser beam

Laser output power

<5 mW visible output   power

Laser safety class

Class 2M

Stand-off distance

36,7 mm

Spot diameter

<4 µm

Depth of focus

±10 µm

Weight

12.5 kg

Camera

Two integrated digital   cameras for displaying measurement and large overview area
  MAIN (measurement area): field of view (mm²) = 0.94 x 0.71, resolution (px) =   1,296 x 966
  AUX (overview area): field of view (mm²) = 3.7 x 2.7, resolution (px) =782 x   582

Front-End Configurations

MSA-100-3D-H

MSA-100-3D-M

MSA-100-3D-V

fmax

100 kHz

2.5 MHz

25 MHz

Number of ranges

13 velocity ranges

13 velocity ranges

13 velocity ranges

vmax

0.01    m/s … 10 m/s,

range dependent

0.001 m/s  … 10 m/s,

range dependent

0.001 m/s  … 10 m/s, range dependent

Velocity resolution, average   value

0.01 (µm/s)/√Hz … 0.02 (µm/s)/√Hz range dependent,   frequency dependent

0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent,   frequency dependent

0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent,   frequency dependent

General Specifications

Power consumption

100 VAC ... 240 VAC ±10%,   50/60 Hz; overall max. 825 W

Environmental conditions

Operating temperature: +18   °C ... +28 °C (64.4 °F ... 82.4 °F);
Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); 

Relative humidity:   max. 80%, non-condensing